Faculty profile
Chettypalayam Selvakumar
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Read how they describe their research on their University of Waterloo profile.
Latest funding
- $17,000
High permittivity (high-k) material gate for MOSFETs and other devices
NSERC · 2006 · Principal investigator
- $96,000
Silicon-germanium and organic semiconductor devices
NSERC · 2002 · Principal investigator
- $81,711
Femto ampere measurement equipment for material and device characterization
NSERC · 2001 · Co-investigator
No publications available.
High permittivity (high-k) material gate for MOSFETs and other devices
Principal investigators: Selvakumar, Chetty
Silicon-germanium and organic semiconductor devices
Principal investigators: Selvakumar, Chetty
Femto ampere measurement equipment for material and device characterization
Principal investigators: Nathan, Arokia
Ellipsometric characterization of electronic thin films for device applications
Principal investigators: Sivoththaman, Sivanarayana
Upgrade of existing sputter deposition system
Principal investigators: Nathan, Arokia
Materials Technology and Analysis Facility - High Resolution Scanning Electron Microscope (SEM) and Electron Spectroscopy for Chemical Analysis (ESCA)/Secondary Ion Mass Spectrometry (SIMS) Microprobe
Principal investigators: Leung, Tong
Keywords: materials characterization, structural imaging, composition analysis, processing, SEM, ESCA/Auger/SIMS, STM/AFM
High performance MOSFETs, bipolar transistors, solar cells, heterostructure devices, IC technology and modelling
Principal investigators: Selvakumar, Chetty
Optical stress analysis equipment for thin film microsensor devices
Principal investigators: Bhatnagar, Yashraj
Silicon device fabrication facility
Principal investigators: Nathan, Arokia
High performance MOSFETs, bipolar transistors, heterojunction devices, IC technology and modelling
Principal investigators: Selvakumar, Chetty
From public funding decisions: CIHR since 2008, NSERC since 1991 and SSHRC since 1998 with their latest competition results, the Canada Foundation for Innovation, Genome Canada, the Canadian Space Agency, Canada Research Chairs, the Fonds de recherche du Québec, Ontario research funding, Michael Smith Health Research BC, the Canadian Cancer Society, Heart & Stroke, Brain Canada and the New Frontiers in Research Fund.
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Profile data last refreshed on September 29, 2026 from the university directory, publication records and public research funding records.